- Title
- Loop-shaping H ∞-control of a 2-DOF piezoelectric-stack actuated platform for nanoscale positioning
- Creator
- Aphale, Sumeet S.; Ferreira, Antoine; Moheimani, S. O. Reza
- Relation
- IEEE International Conference on Robotics and Automation, 2009 (ICRA '09). Proceedings of the IEEE International Conference on Robotics and Automation 2009 (Kobe, Japan 12-17 May, 2009) p. 2563-2568
- Publisher Link
- http://dx.doi.org/10.1109/ROBOT.2009.5152233
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2009
- Description
- Piezoelectric-stack actuated platforms are utilized in many nanopositioning applications. Their performance is limited by their low-frequency resonance due to the mechanical construction as well as piezoelectric nonlinear effects. We propose a hybrid control scheme comprising a loop-shaping H∞ controller and an inversion-based feedforward control scheme, capable of delivering accurate nanopositioning performance at relatively high speeds, upto 40 Hz. It is shown that the implemented control strategy is robust in the presence of uncertainty in resonance frequency due to loading. It is also shown that by employing charge actuation on the fast axis and integral tracking control on the slow axis, accurate raster scans can be obtained. Experimental results that show resonance damping, integral tracking action as well as the robustness of the implemented control scheme to resonance frequency uncertainty are presented. Finally, raster scans recorded at 10 Hz, 20 Hz and 40 Hz are presented to show the achievable positioning performance.
- Subject
- 2-DOF piezoelectric-stack actuated platform; inversion-based feedforward control scheme; loop-shaping H ∞-control
- Identifier
- http://hdl.handle.net/1959.13/918646
- Identifier
- uon:8674
- Identifier
- ISBN:9781424427895
- Rights
- Copyright © 2009 IEEE. Reprinted from the Proceedings of the IEEE International Conference on Robotics and Automation 2009. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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